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History of ISFET

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The Beginning of the ISFET “REVOLUTION”, dated 1970 and 1972

The Letter from Prof. Bergveld to Prof. Matsuo Although my first publications about the development of ISFETs, dated 1970 and 1972, suggest that this is the beginning of the ISFET “revolution”, in reality the research actually started in 1966. In this year my research effort in the field of biomedical measurements, especially those concerning the measurement of local ion concentration variations, could be extended in the direction of silicon electrodes, because at that time Professor Memelink started his MOS research at our University. This was a unique possibility to combine electrode development and MOS technology, leading to the development of ISFETs. As a pioneer in this field I had to fright against …


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